Head Tester

CMP Head Tester

Our CMP Head Tester is an advanced diagnostic platform designed to evaluate, verify, and optimize the performance of CMP polishing heads used across various semiconductor CMP tools.

It provides precise measurement, controlled testing conditions, and comprehensive data analytics to ensure each head meets process requirements before returning to production.

  • User-friendly touchscreen interface
  • Head type selection
  • Wafer absent/wafer present sensor selection for de-chuck sequence
  • Head serialization for data tracking
  • Data logging and graph interface
  • Network compatible or user level dependent USB interface for data downloads 
  • Customizable settings and recipe saving for unique head configurations